SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] MEMS Adaptive Optics III - <title>Design and analysis of repulsive electrostatic driven MEMS actuators</title>

Yao, Jun; Hu, Fangrong; Cai, Dongmei; Jiang, Wenhan; Olivier, Scot S.; Bifano, Thomas G.; Kubby, Joel A. . (2009). SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] MEMS Adaptive Optics III - <title>Design and analysis of repulsive electrostatic driven MEMS actuators</title>. , 7209(), 72090K–72090K-9. doi:10.1117/12.810791

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