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A. Ali-Messaoud; A. Chikouche; A. Estève; A. Hemeryck; C. Lanthony; C. Mastail; M. Djafari Rouhani. (2012). Defect generation during silicon oxidation: A Kinetic Monte Carlo study. , 520(14), 4734–4740. doi:10.1016/j.tsf.2011.10.207 

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